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CLUStar
- -Type : Cluster-type system for mass production
- -Load lock : Cassette handling system
- -Substrate (Wafer) size : up to 300 mm
- -Available system type : RIE, ICP, PECVD
- -Available Wafers : Carrier plate (tray) for multi-wafer loading (option)
CLUStar Line-Up
| Customized system |
Manual Loadlock + Cassette Load Port |
Up to Customer |
Wafer Size | Key Feature |
|---|---|---|---|---|
| Single Chamber | One cassette load port | One chamber | 2″ – 12″ | Small footprint, easy access / Manual·Auto process control |
| Up to 3 Chambers | One or two cassette load ports | Max. 3 chamber system | 2″ – 12″ | Suitable for mass production or R&D |